廣鵬科技有限公司
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Product
Spin Coater
Developer / Etcher / Stripper
Wet Bench
Slit Spin Coater
Organic/Acid/Alkali Wet Bench Series
Co-work with
NCU ME
to demonstrate the capability of slit coater
Substrate Sizes:
620mmx750mm
( Glass, Aluminum, Stainless
Steel, etc. )
Granite Table:Surface Roughness <
±3μm
Coating Speed:<
200mm/s
Max.